Hafnium(IV) tert-butoxide - packaged for use in deposition systems, high purity , CAS No.2172-02-3

  • packaged for use in deposition systems
Item Number
H432324
Grouped product items
SKUSizeAvailabilityPrice Qty
H432324-10g
10g
Available within 8-12 weeks(?)
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$2,774.90

Basic Description

Synonymshafnium(4+);2-methylpropan-2-olate | HAFNIUM TERT-BUTOXIDE | DTXSID50433026 | FT-0730703 | AKOS025293897
Specifications & Puritypackaged for use in deposition systems
Product Description

Application

Hafnium tert -butoxide [Hf(OtBu) 4 ] is a mononuclear; volatile; and highly promising precursor for the deposition of HfO 2 and other hafnium doped thin films by vapor deposition techniques. The deposited films show high dielectric constant suitable for semiconductor devices.

Names and Identifiers

IUPAC Name hafnium(4+);2-methylpropan-2-olate
INCHI InChI=1S/4C4H9O.Hf/c4*1-4(2,3)5;/h4*1-3H3;/q4*-1;+4
InChi Key WZVIPWQGBBCHJP-UHFFFAOYSA-N
Canonical SMILES CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-].[Hf+4]
Isomeric SMILES CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-].[Hf+4]
PubChem CID 9934444
UN Number 1993
Packing Group III
Molecular Weight 470.65

Certificates

Certificate of Analysis(COA)

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Chemical and Physical Properties

Boil Point(°C)90°C/5 mm
Melt Point(°C)8°C

Safety and Hazards(GHS)

Pictogram(s) GHS07,   GHS02
Signal Warning
Hazard Statements

H315:Causes skin irritation

H319:Causes serious eye irritation

H335:May cause respiratory irritation

H302:Harmful if swallowed

H225:Highly Flammable liquid and vapor

H226:Flammable liquid and vapor

Precautionary Statements

P261:Avoid breathing dust/fume/gas/mist/vapors/spray.

P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses if present and easy to do - continue rinsing.

P280:Wear protective gloves/protective clothing/eye protection/face protection.

P370+P378:In case of fire: Use ... to extinguish.

P210:Keep away from heat, hot surface, sparks, open flames and other ignition sources. - No smoking.

P302+P352:IF ON SKIN: wash with plenty of water.

P321:Specific treatment (see ... on this label).

P405:Store locked up.

P501:Dispose of contents/container to ...

P233:Keep container tightly closed.

P240:Ground/bond container and receiving equipment.

P264:Wash hands [and …] thoroughly after handling.

P403+P235:Store in a well-ventilated place. Keep cool.

P303+P361+P353:IF ON SKIN (or hair): Take off Immediately all contaminated clothing. Rinse SKIN with water [or shower].

P271:Use only outdoors or in a well-ventilated area.

P241:Use explosion-proof [electrical/ventilating/lighting/.../] equipment.

P270:Do not eat, drink or smoke when using this product.

P304+P340:IF INHALED: Remove person to fresh air and keep comfortable for breathing.

P403+P233:Store in a well-ventilated place. Keep container tightly closed.

P362+P364:Take off contaminated clothing and wash it before reuse.

P330:Rinse mouth.

P242:Use only non-sparking tools.

P243:Take precautionary measures against static discharge.

P264+P265:Wash hands [and …] thoroughly after handling. Do not touch eyes.

P301+P317:IF SWALLOWED: Get medical help.

P337+P317:If eye irritation persists: Get medical help.

P332+P317:If skin irritation occurs: Get medical help.

P319:Get medical help if you feel unwell.

Class 3

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