| SKU | Size | Availability | Price | Qty |
|---|---|---|---|---|
| T432153-25g | 25g | Available within 8-12 weeks(?) Production requires sourcing of materials. We appreciate your patience and understanding. | $931.90 |
| Synonyms | Tris(dimethylamino)silane|15112-89-7|Silanetriamine, N,N,N',N',N'',N''-hexamethyl-|tris(dimethylamino)silicon|MFCD00048006|TDMAS|Tris(dimethylamido)silane|EINECS 239-165-0|BRN 1901643|SCHEMBL35636|SCHEMBL2513254|DTXSID00884786|BCP30199|[bis(dimethylamino) |
|---|---|
| Specifications & Purity | packaged for use in deposition systems |
| Product Description | Application Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor. |
| INCHI | InChI=1S/C6H18N3Si/c1-7(2)10(8(3)4)9(5)6/h1-6H3 |
|---|---|
| InChi Key | GIRKRMUMWJFNRI-UHFFFAOYSA-N |
| Canonical SMILES | CN(C)[Si](N(C)C)N(C)C |
| Isomeric SMILES | CN(C)[Si](N(C)C)N(C)C |
| WGK Germany | 3 |
| RTECS | VV5800000 |
| PubChem CID | 6335325 |
| Molecular Weight | 161.32 |
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| Flash Point(°F) | 17.6 - 32 °F |
|---|---|
| Flash Point(°C) | -8 - 0 °C |
| Boil Point(°C) | 142 °C |
| Melt Point(°C) | −90 °C |
| Pictogram(s) | GHS06, GHS05, GHS02 |
|---|---|
| Signal | Danger |
| Hazard Statements | H311:Toxic in contact with skin H314:Causes severe skin burns and eye damage H302:Harmful if swallowed H225:Highly Flammable liquid and vapor H330:Fatal if inhaled H261:In contact with water releases flammable gas |
| Precautionary Statements | P280:Wear protective gloves/protective clothing/eye protection/face protection. P231+P232:Handle under inert gas/... Protect from moisture. P370+P378:In case of fire: Use ... to extinguish. P210:Keep away from heat, hot surface, sparks, open flames and other ignition sources. - No smoking. P403+P235:Store in a well-ventilated place. Keep cool. P402+P404:Store in a dry place. Store in a closed container. |
| WGK Germany | 3 |
| RTECS | VV5800000 |
| RIDADR | UN3398-DOTUN3399class4.3-PG2-Organometallicsubstance，liquid，water-reactive，HI:all(notBR) |
